Division: IBN-PT (Nano & Microfabrication)

Ansichten ISG-PT
Some of the IBN-PT facilities


Research and Development Tasks:
  • Fabrication of optical masks for structure transfers down to 750 nm
  • Direct electron beam writing for lateral structures with 25 nm resolution
  • Structure transfer with mask aligner on wafers up to 150 mm diameter
  • Experiments with various resists for lateral structuring with highest resolution

 

Address Division Head
Institute of Bio- and Nanosystems (IBN)
Division: Process Technology (IBN-PT)
Forschungszentrum Jülich GmbH
D-52425 Jülich Germany		 Prof. Andreas Offenhäusser
Tel.: ( 49) 24 61/61-23 30
Fax: ( 49) 24 61/61-87 33
last change 26.10.2007 | | Print